JPH0359634U - - Google Patents
Info
- Publication number
- JPH0359634U JPH0359634U JP11967089U JP11967089U JPH0359634U JP H0359634 U JPH0359634 U JP H0359634U JP 11967089 U JP11967089 U JP 11967089U JP 11967089 U JP11967089 U JP 11967089U JP H0359634 U JPH0359634 U JP H0359634U
- Authority
- JP
- Japan
- Prior art keywords
- overlay
- pattern
- blanks
- blank itself
- blank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000007547 defect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11967089U JPH0359634U (en]) | 1989-10-16 | 1989-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11967089U JPH0359634U (en]) | 1989-10-16 | 1989-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0359634U true JPH0359634U (en]) | 1991-06-12 |
Family
ID=31667780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11967089U Pending JPH0359634U (en]) | 1989-10-16 | 1989-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0359634U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006110044A (ja) * | 2004-10-14 | 2006-04-27 | Terumo Corp | 空圧マッサージ装置 |
-
1989
- 1989-10-16 JP JP11967089U patent/JPH0359634U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006110044A (ja) * | 2004-10-14 | 2006-04-27 | Terumo Corp | 空圧マッサージ装置 |